Apollowave α-100 Apollo Microwave 4-inch Manual Probe Station

1 Probe Station Main Unit: α-100

   1.1 Application:      Wafers or chips of 4 inches and below

    1.2   X-axis:     Coarse adjustment travel:100mm

            Coarse adjustment method: self-locking push-pull rod

            Fine adjustment travel:13mm

            Fine adjustment method: micrometer control

Control resolution: 10 µm

1.3   Y-axis:    Coarse adjustment travel: 120 mm

            Coarse adjustment: self-locking push-pull rod

            Fine adjustment travel: 13 mm

            Fine adjustment: micrometer-controlled

            Control resolution: 10 µm

1.4   Z-axis:    Travel:5 mm

            Coarse adjustment travel:5 mm, accuracy: within ±10%

            Fine adjustment travel:0.3 mm, accuracy: within ±20%

1.5   θ-axis:    Travel: ±10° or more

1.6   Parallelism:  to stage 30umand below

1.7   Dimensions:    400（W）×360（D）×330（H) excluding protrusions

1.8   Weight:    约25kg

1.9   Vacuum pressure    less than-65kPa(for wafer chucking)

1.10  Compressed air: 0.4–0.5 MPa

1.11  Operating environment: temperature 23 °C±5°C, humidity 20%–80%(non-condensing)

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