Model：E/MPS150TRIAX Country of Origin：USA
Category：Standard Manual Probe Station
The EPS150TRIAX is a 6-inch manual probe station engineered for low-noise fA-level current and fC-level capacitance wafer measurement and characterization. Equipped with a low-noise TRIAX chuck, TRIAX probe arms, probes, and cables, it supports Kelvin connections, delivering high confidence for precise I-V/C-V characterization of wafers, fragments, and individual dies.
Low-cost, modular, flexible, customizable 150 mm probe station!
FormFactor brings a modular concept to its best-in-class 150 mm probe stations. Customers can easily configure a probe station solution at low cost to meet current and future requirements. Simply choose the base model, then add accessories or bundles as needed.
Microscope
Stereo zoom microscope
High-resolution microscope
Application kit (including probes)
IV / CV
Basic RF
Millimeter wave
Yes, Keysight N5291 combination
Combined with VDI frequency extension modules
Combined with Focus Delta Tuner
Advanced Terahertz (THz)
Failure analysis
High power
Positioner kit
Basic version
Millimeter wave (mmW)/Terahertz (THz)/load pull probe holder
Stage
Coaxial
Triaxial
RF
High temperature
High power
Probe station base
Basic version
Millimeter wave (mmW)/Terahertz (THz)/load pull probe station base
Coaxial-DC parameter measurement, leakage as low as pA level
Movable probe holder carrying platform, height adjustment of 40mm, contact/separation stroke of 200μm, repeatability of ±1μm
Stage base movement friction adjustable and lockable, with unique Z-direction adjustment and 90mm pull-out design
Magnetic probe holder with three precision linear ball bearings, 1μm resolution
Triax – low-noise measurement, down to fA level
Stereo microscope: 15x–100x magnification, large field of view and CCD mounting interface
Four triaxial probe arms and high-quality triaxial cables
Light/EMI shielding (optional)
Upgrade option for fF-level measurement
Triaxial stage θ-direction fine adjustment of ±8°, with three auxiliary stages, surface flatness ±5μm, ensuring contact force consistency
East/West to North/South measurements in a single setup
RF testing up to 67 GHz
Three optional probes available: INFINITY, ACP probes, | Z | probes
Includes matched cables and calibration substrates
RF chip stage surface flatness of ±3 μm
Unique200μmPositioner carrier platform contact/Separation stroke, repeatability ≤±1μm
WinCal XE calibration software
Millimeter wave (mmW) - 70GHz to Sub-THz and load pull
SlimVue microscope, quick lens change, optical resolution of 1um, can resolve 50um pads
SIGMA kit placement markings engraved on the millimeter wave (mmW) probe holder carrying platform
Supports high-frequency, load pull, coaxial cable and waveguide configurations
The position of the probe holder carrying platform can be read directly via the indicator
Anti-vibration table
Terahertz (THz) and load pull testing
SlimVue microscope, quick lens change, optical resolution of 1um, can resolve 50um pads
SIGMA kit placement markings engraved on the millimeter wave (mmW) probe holder carrying platform
Supports high-frequency, load pull, coaxial cable and waveguide configurations
The position of the probe holder carrying platform can be read directly via the indicator
Rugged mechanical design and vibration isolation platform
Sub-micron precision
Motorized positioner
Positioner carrier platform contact/Separation repeatability <±1um
Micrometer adjustment ensures precise and repeatable probing
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E-mail: sales@jectronic.com
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