Cascade EPS200RF RF Probe Station

EPS200RF Overview

The complete RF measurement package

The application-centric EPS200RF is a complete solution that enables best-in-class RF measurements up to 67 GHz. Based on the PM8 system platform, the EPS200RF package includes all the hardware, software, and accessories you need to confidently probe RF devices with pads smaller than 25μmx35μm.

Applications: RF/mmW

EPS200RF Key Features

Three Probe Technologies

1. Infinity probes: best suited for Al (Si)

2. ACP probes: best suited for AU (III-Vs)

3. IZI probes: rugged probe solution (long life)

4. Precise contact on a wide range of materials across the 26 GHz to 67 GHz frequency range

5. Accurate measurement results and excellent crosstalk immunity

6. Includes matched cables and calibration substrates

Precise Probing Solution

1. RF chuck surface flatness of ±3 μm

2. Unique 500μm platen contact/separate travel with accuracy ≤±1μm

3. Precise probe alignment

4. Consistent probing force

5. Stable contact performance

WinCal XE Calibration Software

1. Unique 1-, 2-, 3-, and 4-port on-wafer calibration algorithms

2. Automated calibration monitoring

3. Unique measurement and analysis methods

4. Accurate S-parameter measurements

5. Efficient automated calibration

6. Simple and fast data processing and report generation