Apollowave MJ-3000 Apollo liquid-nitrogen-free vacuum cryogenic probe station system

Model：MJ-3000 Country of Origin：Japan

Category：Vacuum cryogenic probe station system

Overview：

Enables high/low-temperature vacuum probe testing from -180°C to +100°C without the need for liquid nitrogen.

Features

Specifications

Application Notes

Functions & Configuration

No Liquid Nitrogen Required! Cold/Heated Vacuum Chamber

The MJ-3000 is a compact, lightweight cold/heated vacuum chamber equipped with a pulse-tube cryocooler compatible with 25 mm square wafers, designed for characterizing semiconductor materials and other samples. It eliminates the need for liquid nitrogen, allowing sample temperatures to be varied easily from −180°C to +100°C. An externally operated positioner is also built in, enabling free probe needle movement in vacuum.

	Equipped with a 4-probe externally operated positioner, probe needles can be moved in vacuum without venting to atmosphere.
	Unlike conventional systems, it incorporates a heating stage and a pulse-tube cryocooler ※ , eliminating the need for liquid nitrogen and removing any risk of oxygen deficiency during extended operation.
	The sample temperature can be varied from −180°C to +100°C, enabling long-duration measurements at a constant temperature.
	The chamber lid opens 110° on a hinge, allowing smooth access to the sample.
	A viewing port (with rotating light-shielding cover) comes standard, convenient for light irradiation, sample observation under a microscope, probe positioning, and light shielding.

*The pulse tube cryocooler installed in this system, unlike conventional types, is integrated with the compressor for space savings, low vibration, long service life, and low power consumption.

MJ-3000Basic specifications

Temperature stage section
Temperature Accuracy (Stage Temperature)	±１℃(Hold state)
Vibration	Approx. 2 μm or less
Material	Copper (radiant )
Dimensions	□33mm(Grounded type)
Effective sample dimensions	□25mm
Temperature range	－ 180℃～＋ 100℃（Max.）
Sensor	PT100（4 Wire type)
Heater	Ceramic Heater
Sample holder	4 pcs

Vacuum chamber section
Vacuum level	10 ^－ 2 Pa or more (depends on vacuum pump)
Viewport	Quartz glass φ 79 × t4 mm(Effective viewing diameter66 φ）
Positioner port	For external operation type: 4 pcs
Spare terminal port	1個
Leak valve port	1/ ４"　スウェージロック：1 個
Sensor port	ICF34: 1 pc
Heater port	ICF34: 1 pc
Gauge port	NW25: 1 pc
Spare port	NW25: 1 pc
Vacuum port	NW40: 1 pc

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Apollowave MJ-3000 Apollo liquid-nitrogen-free vacuum cryogenic probe station system

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