IWATSU CS-8000 Series Semiconductor Parameter Analyzer Curve Tracer Replaces Keysight B1505A-B1506A

Model：CS-8000 Country of Origin：Japan

Category：Semiconductor Parameter Analyzer

Overview：

■ High-power testing up to 5 kV and 2000 A ■ Precise low-current measurement (resolution 250 fA) ■ Large 12.1-inch touchscreen ■ Multiple gate signal output functions ■ Extensive temperature characteristic measurement options ■ High-power wafer testing on a probe station

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IWATSU CS-8000 Power Device IV Curve Semiconductor Parameter Analyzer Datasheet

Features

Specifications

Application Notes

Functions & Configuration

The CS-8000 series semiconductor parameter analyzer (curve tracer) is built from modular units—including a 5000 V high-voltage source, a 2000 V high-voltage source, a 2000 A high-current source, and a 200 V medium-voltage source—that can be combined in different configurations to meet customer requirements. Units can be upgraded or added later to address future needs without purchasing new instruments, saving cost. It is ideal for characterization across all process nodes and supports wide-bandgap (third-generation) semiconductor measurement.

■ High-power testing up to 5 kV and up to 2000 A

■ Precise low-current measurement (250 fA resolution)

■ Large 12.1-inch touchscreen

■ Multiple gate signal output functions

■ Extensive temperature characteristic measurement options

■ High-power wafer testing on a probe station

Key features of the CS-8000 series semiconductor curve tracer

Easy-to-use UI

Equipped with a 12.1-inch TFT-LCD (1,280×800) high-definition large display. In addition to touchscreen operation, the function keys on the front panel and dedicated knobs for each function enable intuitive operation.

(1) X-Y display area

Any voltage/current parameter can be assigned to the X and Y axes to display various semiconductor characteristic curves, such as Vds-Id characteristics, threshold voltage, and Vds-Vgs saturation characteristics. Multiple parameters can also be assigned to the Y axis. The scale can be switched between log and linear.

(2) Y-T display area

The applied measurement waveform is displayed on the time axis like an oscilloscope. Since waveform anomalies (such as pulse width, measurement points, and oscillation) can be checked in real time, it is easy to verify whether accurate measurement is possible. All applied waveform data can be stored simultaneously with X-Y display data to re-verify measurement results.

(3) Measurement data display area

Displays detailed measurement results, measurement conditions, and status in plain text format.

(4) Configuration Settings Area

Configure the measurement settings for the device. Graphical display assists with voltage/current unit selection and wiring changes.

5 Parameter setting area

Set measurement parameters, measurement limits, manual/automatic measurement, etc. in this area.

(6) Operation panel

The front panel has buttons and knobs for easy manual measurement. The centered numeric keypad lets you enter parameter values. Manual measurement is easy with the DRAIN/COLLECTOR, GATE/BASE, vertical axis, and horizontal axis knobs.

Output sources suited to the application

Select the voltage and current units required for the measurement according to the application.

The figure on the right shows

Upper: test fixture

Lower: high-current unit

■HV unit
2kV, 5kV high-voltage units. DC/pulse can be selected. Constant-voltage and constant-current drive measurement can be selected.	Main unit CS-8200CS-8500 Max voltage (max current) 2 kV (20 mA) 5 kV (8 mA) Waveform DC, pulse Polarity positive/negative Measurement current resolution 250 fA

	■ MV unit (common to all main units)
Maximum voltage (maximum current) 200 V (2 A), waveform DC (200 mA), pulse (2 A), SIN, half-wave, full-wave, polarity positive/negative/bipolar, measurement current resolution 250 fA	200V medium-voltage unit. You can choose constant-voltage or constant-current drive measurement. In addition to DC and pulse, you can also select SIN, half-wave, and full-wave waveforms.

■ GATE unit (common to all main units)
40V unit. You can choose constant-voltage or constant-current drive measurement. In addition to DC and pulse, SIN is also available.	Max voltage (max current) 40 V (1 A) Waveform DC, pulse, SIN Polarity positive/negative/bipolar Measurement current resolution 250 fA

	■HC Unit
HC unit CS-205 CS-210 CS-220 Max. current (voltage) 500 A (50 V) 1 kA (50 V) 2 kA (50 V) Waveform pulse Pulse width 10 μs to 1 ms 10 μs to 500 μs Polarity positive/negative	Equipped with a high-current mode that supports large-current measurement up to 2000A. Pulse width, measurement period, and measurement range can be changed.

Minimum current resolution 250fA

By adopting triaxial measurement and an optimized measurement system, leakage and noise in the equipment are reduced, enabling stable microcurrent measurement.

Various gate signal outputs

GATE signals can be output and applied in sequence.

Hold time variable range
0.000[s] to 5.000[s]

Standby signal voltage range
GATE side -40[V] to +40[V]

Hysteresis measurement

The CS-8000 has useful functions for measuring wide-bandgap semiconductors (such as SiC and GaN) that exhibit hysteresis.

The dual-sweep function simultaneously displays UP sweep and DOWN sweep, enabling observation of hysteresis.

Safety mechanisms

In addition to the interlock function, it also has an output limit function.

Voltage, current, and power can be set along with each limit to prevent DUT damage.
In addition, the hardware's overcurrent protection function cuts off the current when it reaches 1.4 times the measurement range.

Combination calibration

You can choose an HC unit or fixture to suit the voltage and current of the measurement target.

■ Configuration Example		Used at 2 kV, 2,000 A
	Main unit		CS-8200	Accessory cable
	HC Unit		CS-2200		HV standard cable kit	CS-021
	Test fixture		CS-322HV/HC		HC Standard Cable Kit	CS-022

Main specifications of the CS-8000 Series semiconductor curve tracer

HV unit
CS-8000 series main specifications
Main unit model name	CS-8020	CS-8200	CS-8500（TBD）
Maximum peak voltage (maximum current)	―	2 kV（20 mA）	5 kV（8 mA）
Measurement voltage range (full scale)	―	50 V ～ 2 kV	50 V ～ 5 kV
Measurement current range	―	20 mA ～ 50 μA	20 mA ～ 50 μA
Minimum measurement current resolution	―	250 fA	250 fA
Waveform	―	DC pulse	DC pulse
MV unit
Maximum peak voltage (maximum current)	200 V（2 A）
Measurement voltage range (full scale)	200 mV ～ 200 V
Measurement current range	2 A ～ 5 nA
Minimum measurement current resolution	250 fA
Waveform	DC pulse
Gate unit
Maximum peak voltage (maximum current)	40 V（1 A）
Measurement voltage range (full scale)	1 V ～ 50 V
Measurement current range	5 nA ～ 1 A
Minimum measurement current resolution	250 fA
Waveform	DC pulse SIN (50 Hz)
Standard accessories	Power cord, control interface terminal, user manual (booklet + CD)

HC unit model name	CS-205	CS-210	CS-220
Max peak current (max voltage)	500 A（50 V）	1,000 A（50 V）	2,000 A（50 V）
Measurement voltage range (full scale)	200 mV ～ 50 V	200 mV ～ 50 V	200 mV ～ 50 V
Measurement current range	500 mA ～ 500 A	500 mA ～ 1,000 A	500 mA ～ 2,000 A
Waveform	Pulse (width 10 μs to 1 ms)	Pulse (Width 10 μs to 500 μs)	Pulse (Width 10 μs to 500 μs)
Standard accessories	Power cord, HC-FIXTURE connection unit, user manual

※When using the HC unit, a sensing cable is required separately.

Test fixture model name	CS-320MV (Coming soon)	CS-322HV/HC
Standard accessories	Power cord, standard lead kit (CS-005 Type 1, 7-piece set), user manual
Standard accessories	―	HV/HC cables (2 cables)

• A separate cable is required when connecting a test fixture.

■ Cable set (used when connecting to a test fixture or HC unit.)
Cable set name	Model	Product Name
CS-020 MV standard cable kit (Recommended for CS-320 kit)	CS-026	7 triaxial cables (L=1.0 m)
	CS-027	1 control interface cable (L=1.0 m)
	CS-028	1 interlock/sense cable (L=1.0 m)
CS-021 HV standard cable kit (Recommended for CS-322 kit)	CS-025	2 HV cables (L = 1.0 m)
	CS-026	7 triaxial cables (L=1.0 m)
	CS-027	1 control interface cable (L=1.0 m)
	CS-028	1 interlock/sense cable (L=1.0 m)
CS-022 HC Standard Cable Kit (Recommended kit for HC unit)	CS-027	1 control interface cable (L=1.0 m)
	CS-028	1 interlock/sense cable (L=1.0 m)

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