IWATSU CS-8000 Semiconductor Parameter Analyzer CS-8500 Curve Tracer Iwatsu Japan

Model：CS-8500 Country of Origin：Japan

Category：Semiconductor Parameter Analyzer

Overview：

Combinable with a range of units to support characterization at any process step, enabling next-generation semiconductor measurement.

With up to 5 kV voltage, 2 kA current, pulsed output, gate mode, and low-current measurement, it provides strong support for design and evaluation of wide-bandgap semiconductors such as SiC and GaN.

Features

Specifications

Application Notes

Functions & Configuration

Combinable with a range of units to support characterization at any process step, ideal for next-generation semiconductor measurement.

With up to 5 kV voltage and 2 kA current, plus pulsed output, gate mode, and low-current measurement, it provides strong support for design evaluation of wide-bandgap semiconductors such as SiC and GaN.

High-power testing up to 5 kV and 2000 A
Accurate low-current measurement (250 fA resolution)
Large 12.1-inch touchscreen
Multiple gate signal output functions
Comprehensive temperature-characterization measurement options
High-power wafer testing on a probe station

Intuitive, easy-to-use UI

Equipped with a high-definition 12.1-inch TFT-LCD (1,280×800) large display and touchscreen operation, enabling intuitive control via front-panel function keys and dedicated knobs for each function.

①X-Y display area

Any voltage or current parameter can be assigned to the X and Y axes to display a variety of semiconductor characteristic curves, including Vds-Id characteristics, threshold voltage, and Vds-Vgs saturation characteristics. Multiple parameters can also be assigned to the Y axis. The scale can be switched between log and linear.

② Y-T display area

Applied measurement waveforms can be displayed along a time axis, just like on an oscilloscope. Pulse width, measurement points, oscillation, and other waveform anomalies can be checked in real time, making it easy to verify that measurements were performed correctly. All applied waveform data can be saved together with the X-Y display data, allowing measurement results to be re-examined.

③ Measurement data display area

Detailed measurement results, measurement conditions, and status are displayed as text.

④ Configuration area

Set the measurement configuration for the device. Supports graphical display of voltage/current unit selection and wiring changes.

⑤ Parameter settings area

Use this area to set measurement parameters and limits and to switch between manual and automatic measurement.

⑥ Control Panel

The front panel features buttons and rotary knobs for easy manual measurement. The centrally located numeric keypad allows direct entry of parameter values. Manual measurements can be performed easily using the DRAIN/COLLECTOR/GATE/BASE, vertical-axis, and horizontal-axis rotary knobs.

Application-Specific Output Sources

Voltage/current units can be selected as needed for the measurement application.

The photos on the right show:
Top: test fixture
Bottom: high-current unit

HV unit

2 kV and 5 kV high-voltage units. DC/pulse output selectable. Rated voltage/rated current drive and measurement selectable.

Main unit	CS-8200	CS-8500
Max voltage (max current)	2 kV (20 mA)	5 kV (8 mA)
Waveform	DC, pulsed
Polarity	Positive/negative
Measurement current resolution	250 fA

MV Unit (standard on all main units)

A 200 V medium-voltage unit. Rated voltage/rated current drive measurement selectable. DC, pulse, SIN, half-wave, and full-wave waveforms selectable.

Maximum voltage (maximum current)	200 V (2 A)
Waveform	DC (200 mA), pulse (2 A), SIN, half-wave, full-wave
Polarity	Positive/Negative/Bipolar
Measurement current resolution	250 fA

GATE unit (common to all main units)

40 V unit. Rated voltage/rated current drive and measurement selectable. DC, pulse, and sine wave selectable.

Max voltage (max current)	40 V (1 A)
Waveform	DC, pulse, SIN
Polarity	Positive/negative/bipolar
Measurement current resolution	250 fA

HC Unit

Features a high-current mode that supports measurements up to 2000 A. Pulse width, measurement interval, and measurement range are all adjustable.

HC Unit	CS-205	CS-210	CS-220
Max current (voltage)	500 A (50 V)	1 kA (50 V)	2 kA (50 V)
Waveform	Pulse
Pulse width	10 μs to 1 ms	10 μs to 500 μs
Polarity	Positive/Negative

Minimum current resolution: 250 fA

Optimized triaxial connections and measurement circuitry effectively reduce leakage current and noise within the instrument, enabling stable measurement of low currents.

Pattern GATE Signal Output

Outputs and applies GATE signals in a programmable sequence.

Hold time adjustable range
0.000 [s] to 5.000 [s]

Prestrobe signal voltage range
GATE side: -40 [V] to +40 [V]

SiC Hysteresis Measurement

The CS-8000 offers convenient features for measuring wide-bandgap semiconductors such as SiC and GaN that exhibit hysteresis.

The dual-sweep function displays UP and DOWN sweeps simultaneously, enabling hysteresis observation.

Safety Features

Interlock functionality has been added, along with output limit functions.

Voltage, current, and power limits can be set independently to prevent damage to the DUT.
In addition, hardware overcurrent protection cuts off the current at 1.4 times the measurement range.

Modular configuration

Choose either the HC unit or the test bench, depending on the voltage and current of the device under test.

■ Configuration Example　　For use at 2 kV, 2,000 A
Main unit: CS-8200
HC unit: CS-220
Test bench: CS-8200
Accessory cables:
　HV standard cable set CS-021
　HC standard cable set CS-022

CS-8000 Semiconductor Parameter Analyzer Series Main Specifications

Main unit model name	CS-8020	CS-8200	CS-8500
HV unit
Maximum peak voltage (maximum current)	―	2 kV（20 mA）	5 kV（8 mA）
Measurement voltage range (full scale)	―	2 kV ～ 50 V	5 kV ～ 50 V
Measurement current range	―	20 mA ～ 50 μA	20 mA ～ 50 μA
Minimum measurement current resolution	―	250 fA	250 fA
Waveform	―	DC/pulse	DC/pulse
MV unit
Maximum peak voltage (maximum current)	200 V（1 A）
Measurement voltage range (full scale)	200 V ～ 200 mV
Measurement current range	2 A ～ 5 nA
Minimum measurement current resolution	250 fA
Waveform	DC (200 mA), pulse (2A), SIN, half-wave, full-wave
GATE unit
Maximum peak voltage (maximum current)	40 V（1 A）
Measurement voltage range (full scale)	50 V ～ 1 V
Measurement current range	1 A ～ 5 nA
Minimum measurement current resolution	250 fA
Waveform	DC/pulse/SIN (50 Hz)
Standard accessories	Power cord, control interface terminator, instruction manual (manual + CD)

HC unit model name	CS-205	CS-210	CS-220
Maximum peak current (maximum voltage)	500 A（50 V）	1,000 A（50 V）	2,000 A（50 V）
Measurement voltage range (full scale)	50 V ～ 200 mV	50 V ～ 200 mV	50 V ～ 200 mV
Measurement current range	500 A ～ 5 A	1,000 A ～ 5 A	2,000 A ～ 5 A
Waveform	Pulse (Pulse width 10 μs to 1 ms)	Pulse (Pulse width 10 μs to 500 μs)	Pulse (Pulse width 10μs– 500μs)
Standard accessories	Power cord, HC-FIXTURE connection unit, instruction manual

When using the HC unit, a sensing cable must be prepared separately.

Test fixture model name	CS-320MV (scheduled for release soon)	CS-322HV/HC
Standard accessories	Power cord, standard pin set (CS-005, 1 set of 7), instruction manual
Standard accessories	―	HV/HC cables (2 cables)

A separate connection cable is required when connecting a test bench.

Connection cable set (used when connecting the test bench and HC unit.)

Cable set name	Model	Product name
CS-020 MV standard cable set (Recommended set exclusively for CS-320)	CS-026	Triaxial cables (L=1.0m) 7 pcs
	CS-027	Control interface cable (L=1.0 m) 1 pc.
	CS-028	Interlock/sense cable (L=1.0m) 1 pc
CS-021 HV standard cable set (Recommended set exclusively for CS-322)	CS-025	HV cables (L=1.0m) 2 pcs
	CS-026	Triaxial cables (L=1.0m) 7 pcs
	CS-027	Control interface cable (L=1.0 m) 1 pc.
	CS-028	Interlock/sense cable (L=1.0m) 1 pc
CS-022 HC standard cable set (Recommended set dedicated to HC unit)	CS-027	Control interface cable (L=1.0 m) 1 pc.
	CS-028	Interlock/sense cable (L=1.0m) 1 pc

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