Cascade TESLA 200 FormFactor High-Power 8-Inch Semi-Automatic Probe Station

High power: maximum operating voltage 10 kV (coaxial chuck) (3 kV for triaxial), maximum operating current 600 A (two probes in parallel) / 300 A (maximum pulsed current per single probe)

Optional temperature chuck: maximum temperature range of -55 to 300°C (noise and leakage characteristics will differ from a standard chuck)

Wafer compatibility: 200 mm

Maximum number of probe holders supported: 8 DC probe holders or 4 RF probe holders

Operation: automatic or semi-automatic

uploadfile/2025/1202/20251202042653295.pdf
（CASCADE TESLA-200 DATA SHEET）

Mainly used for power semiconductor wafer testing

Optional automatic/semi-automatic probe station system

Optional standard/thermal CHUCK

Optional probe holders of different specifications