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CASCADE/FORMFACTOR APS/SPS200TESLA

CASCADE/FORMFACTOR APS/SPS200TESLA

Model：APS/SPS200TESLA Country of Origin：USA

Category：Semi-automatic probe station

Overview：

APS/SPS200TESLA is the industry's first fully automated wafer probe solution built specifically for high-power semiconductor production performance. By enabling production wafer testing of high-power devices, the system significantly improves production efficiency and yield in the final test stage, effectively expands manufacturing tolerance margins, and shortens time-to-market. The APS/SPS200TESLA system is designed to optimize the entire process from device characterization to mass production, thereby maximizing overall return on investment.

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CASCADE APS/SPS200TESLA Automatic Probe Station Specification

Features

Specifications

Application Notes

Functions & Configuration

The APS/SPS200TESLA features a high-power automatic discharge chuck for thin or TAIKO wafer handling, along with an arc-prevention solution that enables precise, efficient measurement under high-power conditions.

The system ensures precise production testing up to 10.5 kV DC / 400 A while providing a safe, regulatory-certified probe testing environment.

With Velox™ probe station control software, the APS200TESLA enables safe, fast wafer loading, convenient test automation, and measurement system integration, effectively preventing damage to probe tips and probe cards throughout the process.

VeloxPro™ test automation software features an open architecture designed for fully automated wafer probing. Compliant with SEMI E95, VeloxPro easily handles automated wafer handling, cassette mapping, temperature control, Z-axis profiling, and step control.

Built on Velox and VeloxPro technology, the APS200TESLA delivers convenient test automation and high test throughput.

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