CASCADE-IWATSU Tesla series 8-inch high-voltage SiC probe station system

The widespread use of power semiconductors has created an urgent need for fast, efficient characterization of power devices. Cascade Microtech's new Tesla on-wafer power device characterization system meets this need, shortening time-to-market for new power devices. Tesla is the industry's first power device measurement system, offering a complete on-wafer solution for overheated, low-contact-resistance measurements of power semiconductors at currents up to 400A and voltages up to 3000V. The new system incorporates two new wafer probes and an entirely new wafer chuck technology.

• The high-current parameter (HCP) probeis designed specifically to meet Rds(on) measurement requirements. Its unique design minimizes thermal runaway at the probe-to-wafer contact and supports currents up to 10A (in continuous mode) and up to 60A (in pulsed mode).

• The high-voltage parameter (HVP) probe enables breakdown voltage measurements with leakage currents as low as 1pA at voltages up to 3000V.

• Exclusive Vacuchannel™ chuck technology addresses today's power device wafer requirements with an advanced handling method for thin wafers (down to 100μm). In addition, Vacuchannel technology handles power-dissipating devices differently from other solutions currently on the market, enabling on-wafer measurement of devices dissipating up to 75W.